Hsu, C.-P. et al. A review and perspective on optical phased array for automotive LiDAR. IEEE J. Sel. Top. Quantum Electron. 27, 1–16 (2021).
Sharif Azadeh, S. et al. Microcantilever-integrated photonic circuits for broadband laser beam scanning. Nat. Commun. 14, 2641 (2023).
Wang, D., Watkins, C. & Xie, H. MEMS mirrors for LiDAR: a review. Micromachines 11, 456 (2020).
Hofmann, U., Janes, J. & Quenzer, H.-J. High-Q MEMS resonators for laser beam scanning displays. Micromachines 3,…