1 INTRODUCTION
Electron backscatter diffraction (EBSD) is a scanning electron microscopy (SEM) technique, providing important crystallographic information about the sample such as crystal orientation and grain size.1 Figure 1 shows the typical instrument geometry, where an EBSD pattern (EBSP) is formed from an electron beam incident on a crystal plane of a highly tilted sample.1
Operating principles of EBSD imaging. A convergent electron beam is raster scanned across the sample. Backscattered electrons form a pair of cones which intersect the phosphor screen, allowing the EBSD pattern to be read by the detector.
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